Hinge for micro-mechanical device

Details Hinge for micro-mechanical device Hinge for micro-mechanical device

1994-06-30

1997-07-29

Neyzari, Ali

Optical: systems and elements

Optical modulator

Light wave temporal modulation

359846, G02B 2600

Patent

active

056526717

ABSTRACT:
An improved hinge (12) for a micro-mechanical device (10). The hinge is fabricated from alternating layers (12a, 12b) of different materials. A first material is selected on the basis of its amenability to fabrication processes and a second material is chosen for its strength, or some other desired characteristic, relative to the first material.

REFERENCES:
patent: 4423401 (1983-12-01), Mueller
patent: 4740410 (1988-04-01), Muller et al.
patent: 5096279 (1992-03-01), Hombeck et al.
patent: 5233456 (1993-08-01), Nelson
patent: 5374792 (1994-12-01), Ghezzo et al.
patent: 5399415 (1995-03-01), Chen et al.

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