Hinge design for enhanced optical performance for a digital...

Details Hinge design for enhanced optical performance for a digital... Hinge design for enhanced optical performance for a digital...

2011-03-22

2011-03-22

Mack, Ricky L (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S298000

Reexamination Certificate

active

07911679

ABSTRACT:
An apparatus for use with a digital micro-mirror100includes a hinge116disposed outwardly from a substrate102. The hinge116is capable of at least partially supporting a micro-mirror104disposed outwardly from the hinge116. The micro-mirror104is capable of being selectively transitioned between an on-state position and an off-state position. In one particular embodiment, the hinge116comprises a substantially flat profile for at least a portion of the hinge116disposed between a first hinge post108of the hinge116and a mid-point of the hinge116. The apparatus also includes a plurality of process control voids formed within a conductive layer120disposed inwardly from the hinge116. In one particular embodiment, the substantially flat profile is at least partially created from the plurality of process control voids.

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patent: 2004/0165249 (2004-08-01), Aubuchon

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