Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent
1994-01-24
1995-07-04
Chilcot, Jr., Richard E.
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
73517B, G01C 100
Patent
active
054289963
ABSTRACT:
An integrated accelerometer includes hinges of silicon composition for securing the strut legs of a pendulous mass to the accelerometer body. Both the body of the accelerometer and the pendulous mass are of metal-coated compositions. Metallized pads are provided on selected surfaces of the hinges for forming eutectic bonds with the body and struts of the pendulous mass of the accelerometer. A heavily-doped continuous region adjacent the surface of the hinge connects the eutectic bonds through a flexure region of reduced thickness to complete necessary device circuitry.
REFERENCES:
patent: 4660418 (1987-04-01), Greenwood et al.
patent: 4679434 (1987-07-01), Stewart
patent: 4987780 (1991-01-01), Abbink et al.
Abbink Henry C.
Engel James W.
Lodwig Dean H.
Stewart Robert E.
Biegel R.
Chilcot Jr. Richard E.
Kramsky Elliott N.
Litton Systems Inc.
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