Highly-steady beam generating for charged particles

Details Highly-steady beam generating for charged particles Highly-steady beam generating for charged particles

1982-09-28

1984-08-21

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

With detector

250396R, 2505051, 3133631, G01K 100, H01J 300

Patent

active

044672055

ABSTRACT:
An electron beam generating system provides a high degree of steadiness of the beam current and comprises a heated cathode, an auxiliary electrode lying at a more negative potential than the cathode, and a transpierced anode. A diaphragm surrounding the beam and connected to a precision resistor is further provided at that side of the auxiliary electrode facing away from the cathode. A portion of the beam current influenced by the control electrode is blanked out by the diaphragm. The precision resistor is connected as an actual value generator to a regulator which is connected to a reference voltage, the output of the regulator influencing the potential of the control electrode over a final control element for the purpose of maintaining the beam current measured by the diaphragm constant.

REFERENCES:
patent: 3887784 (1975-06-01), Alois et al.
patent: 3903392 (1975-09-01), Konig et al.
patent: 3937966 (1976-02-01), Godel et al.
patent: 4058730 (1977-11-01), Mayer et al.
patent: 4260897 (1981-04-01), Bakker et al.
patent: 4309589 (1982-01-01), Hashimoto et al.

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