Optics: measuring and testing – By light interference – Having wavefront division
Reexamination Certificate
2006-04-17
2008-10-21
Connolly, Patrick J (Department: 2877)
Optics: measuring and testing
By light interference
Having wavefront division
C356S505000, C356S499000
Reexamination Certificate
active
07440117
ABSTRACT:
Micron-scale displacement measurement devices having enhanced performance characteristics are disclosed. One embodiment of a micron-scale displacement measurement device includes a phase-sensitive reflective diffraction grating for reflecting a first portion of an incident light and transmitting a second portion of the incident light such that the second portion of the incident light is diffracted. The device further includes a mechanical structure having a first region and a second region, the mechanical structure positioned a distance d above the diffraction grating, the second portion of the incident light is reflected off of the first region of the structure such that an interference pattern is formed by the reflected first portion and the reflected second portion of the incident light. The device can further include an electrode extending toward, but spaced a distance away from, the second region of the mechanical structure.
REFERENCES:
patent: 4188124 (1980-02-01), Jaerisch et al.
patent: 4380365 (1983-04-01), Gross
patent: 5046800 (1991-09-01), Blyler, Jr. et al.
patent: 5047633 (1991-09-01), Finlan et al.
patent: 5130356 (1992-07-01), Feuerherd et al.
patent: 5247186 (1993-09-01), Toda
patent: 5253515 (1993-10-01), Toda et al.
patent: 5302656 (1994-04-01), Kohara et al.
patent: 5359208 (1994-10-01), Katsuki et al.
patent: 5402234 (1995-03-01), Deck
patent: 5434196 (1995-07-01), Ohkawa et al.
patent: 5445011 (1995-08-01), Ghislain et al.
patent: 5462995 (1995-10-01), Hosaka et al.
patent: 5526116 (1996-06-01), de Groot
patent: 5565987 (1996-10-01), Jain et al.
patent: 5581414 (1996-12-01), Snyder
patent: 5896479 (1999-04-01), Vladic
patent: 5900729 (1999-05-01), Moser et al.
patent: 5908981 (1999-06-01), Atalar et al.
patent: 5908987 (1999-06-01), Raj
patent: 5923033 (1999-07-01), Takayama et al.
patent: 5952657 (1999-09-01), Alexander et al.
patent: 6022498 (2000-02-01), Buazza et al.
patent: 6028305 (2000-02-01), Minne et al.
patent: 6038057 (2000-03-01), Brazas, Jr. et al.
patent: 6039897 (2000-03-01), Lochhead et al.
patent: 6156394 (2000-12-01), Schultz Yamasaki et al.
patent: 6181097 (2001-01-01), Li et al.
patent: 6196061 (2001-03-01), Adderton et al.
patent: 6206673 (2001-03-01), Lipscomb et al.
patent: 6247747 (2001-06-01), Kawanomoto et al.
patent: 6251755 (2001-06-01), Furukawa et al.
patent: 6253004 (2001-06-01), Lee et al.
patent: 6259567 (2001-07-01), Brown et al.
patent: 6262414 (2001-07-01), Mitsuhashi
patent: 6272275 (2001-08-01), Cortright et al.
patent: 6272907 (2001-08-01), Neukermans et al.
patent: 6279389 (2001-08-01), Adderton et al.
patent: 6281508 (2001-08-01), Lee et al.
patent: 6291927 (2001-09-01), Percin et al.
patent: 6400166 (2002-06-01), Babson et al.
patent: 6432328 (2002-08-01), Hamanaka et al.
patent: 6445109 (2002-09-01), Percin et al.
patent: 6500603 (2002-12-01), Shioda
patent: 6523392 (2003-02-01), Porter et al.
patent: 6567572 (2003-05-01), Degertekin et al.
patent: 6643025 (2003-11-01), Degertekin et al.
patent: 6672144 (2004-01-01), Adderton et al.
patent: 6678813 (2004-01-01), Le
patent: 6684686 (2004-02-01), Itsujji et al.
patent: 6753969 (2004-06-01), Degertekin et al.
patent: 6827979 (2004-12-01), Mirkin et al.
patent: 6836112 (2004-12-01), Hennessy
patent: 6853041 (2005-02-01), Khuri-Yakub et al.
patent: 6862923 (2005-03-01), Buguin et al.
patent: 6862924 (2005-03-01), Xi et al.
patent: 6882429 (2005-04-01), Weitekamp et al.
patent: 6884981 (2005-04-01), Proksch et al.
patent: 7068377 (2006-06-01), Degertekin et al.
patent: 7116430 (2006-10-01), Degertekin et al.
patent: 2001/0000279 (2001-04-01), Daniels et al.
patent: 2001/0013574 (2001-08-01), Warren et al.
patent: 2001/0035700 (2001-11-01), Percin et al.
patent: 2001/0049959 (2001-12-01), Neukermans et al.
patent: 2002/0039463 (2002-04-01), Degertekin et al.
patent: 2002/0163648 (2002-11-01), Degertekin et al.
patent: 2003/0033863 (2003-02-01), Ashby et al.
patent: 2003/0038949 (2003-02-01), Degertekin et al.
patent: 2003/0042409 (2003-03-01), Warren et al.
patent: 2003/0047675 (2003-03-01), Proksch et al.
patent: 2003/0184761 (2003-10-01), Degertekin et al.
patent: 2003/0200798 (2003-10-01), Lindig et al.
patent: 2004/0065821 (2004-04-01), Warren et al.
patent: 2004/0080382 (2004-04-01), Nakanishi et al.
patent: 2004/0127025 (2004-07-01), Crocker, Jr. et al.
patent: 2004/0129063 (2004-07-01), Balooch et al.
patent: 2004/0130728 (2004-07-01), Degertekin et al.
patent: 2004/0154367 (2004-08-01), Oumi et al.
patent: 2004/0206165 (2004-10-01), Minne et al.
patent: 2004/0216517 (2004-11-01), Xi et al.
patent: 2005/0013230 (2005-01-01), Adelmann
patent: 2005/0017173 (2005-01-01), Kumar
patent: 2005/0048651 (2005-03-01), Ryttsen et al.
patent: 2005/0066714 (2005-03-01), Adderton et al.
patent: 2005/0145021 (2005-07-01), Chand et al.
patent: 2005/0180678 (2005-08-01), Panepucci et al.
patent: 2005/0181132 (2005-08-01), Mirkin et al.
patent: 2006/0098208 (2006-05-01), Degertekin et al.
patent: 2006/0181712 (2006-08-01), Degertekin et al.
patent: 2006/0192976 (2006-08-01), Hall et al.
patent: 2006/0227845 (2006-10-01), Degertekin et al.
patent: 2006/0283338 (2006-12-01), Degertekin
patent: 2007/0012094 (2007-01-01), Degertekin et al.
patent: 2007/0089496 (2007-04-01), Degertekin
patent: 2007/0103697 (2007-05-01), Degertekin
patent: 2007/0165896 (2007-07-01), Miles et al.
patent: 2007/0295064 (2007-12-01), Degertekin et al.
patent: 05248810 (1992-09-01), None
patent: 07065428 (1995-03-01), None
patent: 10073608 (1998-03-01), None
patent: 10090287 (1998-04-01), None
patent: 200493574 (2004-03-01), None
Zygo Corporation, “Zygo Corporation's New View 5000™; Precise, Rapid, Noncontact 3D Surface Profiling,” Apr. 2001.
Cooper et al., “High-resolution micromachined interferometric accelerometer,” Applied Physics Letters, vol. 27, No. 22, May 29, 2000, pp. 3316-3318.
Manalis, et al., “Interdigital cantilevers for atomic force microscopy,” Applied Physics Letters, vol. 65, No. 25, Dec. 16, 1996, pp. 3944-3946.
Yaralioglu et al., “Analysis and design of an interdigital cantilever as a displacement sensor,” Journal of Applied Physics, vol. 83, No. 12, Jun. 15, 1998, pp. 7405-7415.
Chen, et al.; “Fully Embedded Board-Level Guided-Wave Optoelectronic Interconnects”; Jun. 2000; Proceedings of IEEE, vol. 88, No. 6; pp. 780-793.
Wiesmann, et al.; “Singlemode Polymer Waveguides for Optical Backplanes”; Dec. 5, 1996; Electronics Letters, vol. 32, No. 25; pp. 2329-2330.
Barry, et al.; “Highly Efficient Coupling Between Single-Mode Fiber and Polymer Optical Waveguides”; Aug. 1997; IEEE Transactions on Components, Packaging, and Manufacturing Technology—Part B, vol. 20, No. 3; pp. 225-228.
Lee, et al.; “Fabrication of Polymeric Large-Core Waveguides for Optical Interconnects Using a Rubber Molding Process”; Jan. 2000; IEEE Photonics Technology Letters, vol. 12, No. 1; pp. 62-64.
Schmeider, et al.; “Electro-Optical Printed Circuit Board (EOPCB)”; 2000 Electronic Components and Technoogy Conference; pp. 749-753.
Mederer, et al.; “3Gb/s Data Transmission With GaAs VCSELs Over PCB Integrated Polymer Waveguides”; Sep. 2001; IEEE Photonics Technology Letters, vol. 13, No. 9; pp. 1032-1034.
Schröder, et al.; “Polymer Optical Interconnects for PCB”; 2001; Session 13: Photonic Polymers II; pp. 337-343.
Glukh, et al.; “High performance Polymeric Materials for Waveguide Applications”; Aug. 2000; SPIE—The International Society for Optical Engineering, Linear, Nonlinear, and Power Limiting Organics, San Diego, vol. 4106; pp. 1-11.
Liu, et al.; “Plastic VCSEL Array Packaging and High Density Polymer Waveguides for Board and Backplane Optical Interconnect”; 1998; Electronic Components and Technology Conference; pp. 999-1005.
Bakir, et al.; “Sea of Dual Mode Polymer Pillar I/O Interconnections for Gigascale Integration”; 2003; IEEE International Solid State Circuits Conference; 8 pages.
Beuret, e
Degertekin Fahrettin Levent
Hall Neal Allen
Lee Wook
Connolly Patrick J
Georgia Tech Research Corp.
Thomas Kayden Horstemeyer & Risley LLP
LandOfFree
Highly-sensitive displacement-measuring optical device does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Highly-sensitive displacement-measuring optical device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Highly-sensitive displacement-measuring optical device will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3995265