Highly sensitive defect detection method

Details Highly sensitive defect detection method Highly sensitive defect detection method

2008-04-22

2008-04-22

Lauchman, Layla G. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237400, C382S144000, C382S145000

Reexamination Certificate

active

07362428

ABSTRACT:
A highly sensitive defect detection method is disclosed. A medium with a refractive index greater than 1 is formed on a sample. As a result, incident light projected by a defect detecting system attenuates less when reaching the bottom defects. The detection sensitivity of the defect detecting system is enhanced accordingly.

REFERENCES:
patent: 5432607 (1995-07-01), Taubenblatt

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