Highly reflective MEMS device

Details Highly reflective MEMS device Highly reflective MEMS device

2011-06-07

2011-06-07

Mack, Ricky L (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S291000

Reexamination Certificate

active

07957049

ABSTRACT:
An interference-based MEMS device having a lower substrate including a substrate electrode; a lower membrane spaced apart from the lower substrate by a lower gap, the lower membrane including a lower membrane electrode; an upper membrane located on a side of the lower membrane opposite the lower substrate and spaced apart from the lower membrane by an upper gap, the upper membrane including an upper membrane electrode; and control circuitry configured to provide control voltages to the electrodes of the lower substrate, the lower membrane and the upper membrane to change the dimensions of the lower gap and the upper gap to control the reflective properties of the device with respect to light incident upon the lower substrate.

REFERENCES:
patent: 5835255 (1998-11-01), Miles
patent: 5986796 (1999-11-01), Miles
patent: 6055090 (2000-04-01), Miles
patent: 7372613 (2008-05-01), Chui et al.
patent: 2004/0222418 (2004-11-01), Mochizuki
Co-pending U.S. Appl. No. 12/568,622, filed Sep. 28, 2009.
Co-pending U.S. Appl. No. 12/568,622, filed Sep. 28, 2009 (Previously listed on IDS submitted Feb. 12, 2010).

Affiliated with

Also associated with

Rating

Highly reflective MEMS device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Highly reflective MEMS device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Highly reflective MEMS device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2744658