Alloys or metallic compositions – Titanium base
Patent
1992-04-09
1993-04-20
Yee, Deborah
Alloys or metallic compositions
Titanium base
148421, C22C 1400
Patent
active
052040577
ABSTRACT:
The crude Ti particles prepared by molten salt electrolysis or Iodide method are classified into each particle diameter according to contents of impurities, and the crude Ti particles having a desired particle diameter are selected from the crude Ti particles classified depending on each particle diameter. Otherwise, the crude Ti particles are acid-treated. Then they are electron-beam-melted. Through the above production process, there is prepared a highly purified Ti material having an oxygen content of not more than 350 ppm, Fe, Ni and Cr contents of not more than 15 ppm each, Na and K contents of not more than 0.5 ppm each, a reduction of area as a material characteristic of not less than 70%, and a thermal conductivity of not less than 16 W/m K. In short, the highly purified Ti material satisfying high purity, good processability and good thermal conductivity can be obtained. A film having more uniform thickness of film and inside structure can be obtained from a sputtering target prepared using the above highly purified Ti material.
REFERENCES:
patent: 4678506 (1987-07-01), Bania
patent: 4793854 (1988-12-01), Shimotori et al.
patent: 4891066 (1990-01-01), Shimotori et al.
Ishigami Takashi
Kawai mituo
Yagi Noriaki
Kabushiki Kaisha Toshiba
Yee Deborah
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