Highly purified metal material and sputtering target using the s

Metal treatment – Process of modifying or maintaining internal physical... – Carburizing or nitriding using externally supplied carbon or...

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20419215, 2041923, 437192, H01L 21477

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active

054586976

ABSTRACT:
This is a highly purified metal comprising one metal selected from the group consisted of titanium, zirconium and hafnium. The highly purified metal has an Al content of not more than 10 ppm. It also has an oxygen content of more than 250 ppm, each of Fe, Ni and Cr contents not more than 10 ppm and each of Na and K contents not more than 0.1 ppm. The highly purified metal is obtained by either purifying crude metal by the iodide process or surface treating crude metal to remove a contaminated layer existing on the surface thereof and then melting The surface treated material with electron bean in a high vacuum.

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Lee, Seung-Yee, "Ti, Zr Smelting," Non-ferrous Metal Smelting Engineering, Korea, Jan. 25, 1987, pp. 406-408.
Yang, Hun-Young, "Special Melt Refining Method," Iron & Steel Smelting Engineering, Korea, Jan. 25, 1987, pp. 424-425.

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