Highly producible magnetoresistive RAM process

Details Highly producible magnetoresistive RAM process Highly producible magnetoresistive RAM process

1994-12-29

1996-03-05

Thomas, Tom

Fishing, trapping, and vermin destroying

437 48, H01L 218239

Patent

active

054967597

ABSTRACT:
A process for forming a magnetoresistive bit and an interconnection to an underlying component forms a pattern in an amorphous dielectric overlying the magnetic materials. Portions of the magnetic materials are removed to form a bit having a smooth bit edge profile by ion milling. The bit has a bit end located over the underlying component. A second amorphous dielectric layer is deposited and etched at the bit end to form a via at the underlying component. Conventional first metal is used to form the interconnection.

REFERENCES:
patent: 4897288 (1990-01-01), Jenson
patent: 4918655 (1990-04-01), Daughton
patent: 4945397 (1990-07-01), Schuetz

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