Stock material or miscellaneous articles – Self-sustaining carbon mass or layer with impregnant or...
Patent
1995-06-06
1996-06-04
Turner, A. A.
Stock material or miscellaneous articles
Self-sustaining carbon mass or layer with impregnant or...
310313R, 428688, H01L 4108
Patent
active
055231608
ABSTRACT:
The highly-oriented diamond film is a diamond film formed by chemical vapor deposition, with at least 95% of its area consisting of either (100) or (111) crystal planes, and the differences {.DELTA..alpha., .DELTA..beta., .DELTA..gamma.} of the Euler angles {.alpha., .beta., .gamma.} between the adjacent crystals satisfying (.vertline..DELTA..alpha..vertline..ltoreq.1.degree., .vertline..DELTA..beta..vertline..ltoreq.1.degree. and .vertline..DELTA..gamma..vertline..ltoreq.1.degree.) simultaneously. Thus obtained highly-oriented diamond film has few grain boundaries and high carrier mobility. And the area of the diamond film can be large.
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Kobashi Koji
Miyata Koichi
Nishimura Kozo
Stoner Brian R.
Tachibana Takeshi
Kobe Steel USA Inc.
Turner A. A.
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