Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2007-07-30
2011-10-25
Rosenau, Derek (Department: 2837)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
Reexamination Certificate
active
08044556
ABSTRACT:
A nanoelectromechanical systems (NEMS) device and method for using the device provide for a movable member that includes a region of low conductivity over which an electric field is developed. A region width is within a factor of ten (10) of a thickness of the NEMS device. The region is formed between a junction that incorporates piezoelectric material. A first voltage is applied across the region which alters a width of an active portion of the region thereby adjusting a movement of the movable member induced by a second voltage. The second voltage is applied across the region to produce a strain on the active portion of the region. The strain results in a defined movement of the movable member.
REFERENCES:
patent: 3185935 (1965-05-01), White
patent: 2002/0172820 (2002-11-01), Majumdar et al.
patent: 2003/0123124 (2003-07-01), Abu-Ageel
patent: 2004/0212277 (2004-10-01), Stommer
Blom, F. R., et al., Thin-film ZnO as micromechanical actuator at low frequencies, Sens Actuators A Phys; Sensors and Actuators, A: Physical 2 PT2 1990, Jun. 25, 1989, pp. 226-228, XP008086350, vol. 21, No. 1-3.
Elwenspoek, M. et al., Transduction mechanisms and their applications in micromechanical devices, IEEE Micro Electro Mechanical Systems, Feb. 20, 1989, pp. 126-132, XP010092263, New York, NJ, USA.
Strittmatter, R. P., et al., GaN Schottky diodes for piezoelectric strain sensing, Journal of Applied Physics, American Institute of Physics, May 1, 2003, pp. 5675-5681, XP012059587, ISSN: 0021-8979, vol. 93, No. 9.
Knoll, et al., Micron-sized mechanical oscillators created by 3D two-photon polymerization: Towards a mechanical logic device, Microelectronic Engineering, Apr. 2006, pp. 1261-1264, XP005426810, ISSN: 0167-9317, vol. 83, No. 4-9, Elsevier Publishers BV, Amsterdam, NL.
Bargatin, I, et al., Database Inspec [Online], The Institution of Electrical Engineers, Stevenage, GB; Mar. 28, 2005, Bargatin I et al: Sensitive detection of nanomechanical motion using piezoresistive signal downmixing, XP002460547, Database accession No. 8361005, & Applied Physics Letters AIP USA, Mar. 28, 2005, p. 133109-1, ISSN: 0003-6951, vol. 86, No. 13.
Armantrout, Robert J., An IF module for wide-bandwidth signals—HP 70910A test device—Product Information—Technical, Hewlett-Packard Journal, [Online] Nov. 1995, pp. 1-11, XP002460546, Retrieved from the Internet: URL:http://findarticles.com/p/articles/mi—mOHPJ/is—n5—v46/ai—17496582/print>[retrieved on Nov. 29, 2007].
I. Bargatin et al., Efficient electrothermal actuation of multiple modes of high-frequency nanoelectromechanical resonators, Applied Physics Letters, (2007), 093116-1, 093116-2, 093116-3, vol. 90.
R. G. Beck et al., Strain-sensing cryogenic field-effect transistor for integrated strain detection in GaAs/AlGaAs microelectromechanical systems, Appl. Phys. Lett., Jun. 24, 1996, pp. 3763-3765, vol. 68, Issue No. (26).
D. W. Carr et al., Fabrication of nanoelectromechanical systems in single crystal silicon using silicon on insultor substrates and electron beam lithography, J. Vac. Sci. Technol. B, Nov./Dec. 1997, pp. 2760-2763, vol. 15, Issue No. (6).
A. N. Cleland et al., Noise processes in nanomechanical resonators, Journal of Applied Physics, Sep. 1, 2002, pp. 2758-2769, vol. 92, Issue No. 5.
A. N. Cleland et al., A nanometre-scale mechanical electrometer, Nature, Mar. 12, 1998, pp. 160-162, vol. 392, Nature Macmillan Publishers Ltd.
H. G. Craighead, Nanoelectromechanical Systems, Science, Nov. 24, 2000, pp. 1532-1535, vol. 290.
M. J. Curie, Developpement par compression de l'electricite polaire dans les cristaux hemiedres a faces inclinees, Bulletin de la Societe mineralogique de France, (1880), pp. 90-93.
Don L. Devoe, Piezoelectric thin film micromechanical beam resonators, Sensors and Actuators A, (2001), pp. 263-272, vol. 88.
K. L. Ekinci et al., Electromechanical Transducers at the Nanoscale: Actuation and Sensing of Motion in Nanoelectromechanical Systems (NEMS), Small, (2005), pp. 786-797, vol. 1, Issue No. 8-9.
W. Chung Fon et al., Nanoscale, Phonon-Coupled Calorimetry with Sub-Attojoule/Kelvin Resolution, Nano Letters, (2005), pp. 1968-1971, vol. 5, Issue No. 10.
K. Fricke, Piezoelectric properties of GaAs for application in stress transducers, J. Appl. Phys., Jul. 15, 1991, pp. 914-918, vol. 70, Issue No. (2).
J. Fritz et al., Translating Biomolecular Recognition into Nanomechanics, Science, Apr. 14, 2000, pp. 316-318, vol. 288.
A. Husain et al., Nanowire-based very-high-frequency electromechanical resonator, Applied Physics Letters, Aug. 11, 2003, pp. 1240-1242, vol. 83, Issue No. 6.
Seong Chan Jun et al., Electrothermal tuning of Al-SiC nanomechanical resonators, Nanotechnology, (2006), pp. 1506-1511, vol. 17, Institute of Physics Publishing.
R. Knobel et al., Piezoelectric displacement sensing with a single-electron transistor, Applied Physics Letters, Sep. 16, 2002, pp. 2258-2260, vol. 81, Issue No. 12.
M. D. Lahaye et al., Approaching the Quantum Limit of a Nanomechanical Resonator, Science, Apr. 2, 2004, pp. 74-77, vol. 304.
Mark C. Lonergan et al., Array-Based Vapor Sensing using Chemically Sensitive, Carbon Black-Polymer Resistors, Chem. Mater, 1996, pp. 2298-2312, vol. 8.
Constanze Hohberger Metzger et al., Cavity cooling of a microlever, Nature, Dec. 23-30, 2004, pp. 1002-1005, vol. 432, Nature Publishing Group.
Brett Piekarski et al., Surface micromachined piezoelectric resonant beam filters, Sensors and Actuators A, (2001), pp. 313-320, vol. 91.
M. L. Roukes et al., Mechanical Computation, Redux?, Electron Devices Meeting, Dec. 13-15, 2004, pp. 539-542, IEDM Technical Digest, IEEE International.
Thomas Rueckes et al., Carbon Nanotube-Based Nonvolatile Random Access Memory for Molecular Computing, Science, Jul. 7, 2000, pp. 94-97, vol. 289.
D. Rugar et al., Mechanical Parametric Amplification and Termomechanical Noise Squeezing, Physical Review Letters, Aug. 5, 1991, pp. 699-702, vol. 67, Issue No. 6.
Jan Soderkvist, Similarities between piezoelectric, thermal and other internal means of exciting vibrations, J. Micromech. Microeng., (1993), pp. 24-31, vol. 3.
Y. T. Yang et al., Zeptogram-Scale Nanomechanical Mass Sensing, Nano Letters, Mar. 15, 2006, pp. A-D, vol. 0, Issue No. 0 and vol. 6, p. 583 et seq.
Yong Zhang, Sensitivity of a piezoelectric micromechanical displacement detector based on the radio-frequency single-electron transistor, Journal of Applied Physics, Dec. 15, 2002, pp. 7550-7555, vol. 92, Issue No. 12.
Karabalin Rassul Bulatovich
Masmanidis Sotirios Konstantinos
Roukes Michael L.
California Institute of Technology
Gates & Cooper LLP
Rosenau Derek
LandOfFree
Highly efficient, charge depletion-mediated, voltage-tunable... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Highly efficient, charge depletion-mediated, voltage-tunable..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Highly efficient, charge depletion-mediated, voltage-tunable... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4277656