Highlighted panel inspection

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1993-06-01

1994-11-22

Rosenberger, Richard A.

Optics: measuring and testing

By polarized light examination

With light attenuation

356376, G01B 1130

Patent

active

053673786

ABSTRACT:
A method of evaluating defects in a surface as compared with a reference surface by providing a surface for defect evaluation, illuminating and projecting a pattern of lines on the surface having a periodic configuration with features having a separation period, providing a camera for recording a reflected image of the pattern of lines projected and reflected from the surface, and evaluating and quantifying the image by calculating a slope of a defect observed by the camera using a specified relationship. The distance between the illuminated pattern and the surface are used to calculate the defect slope and a defect depth value is generated using a specified relationship dependent on length of a defect area visually recognizable from the reflected image and the calculated defect slope.

REFERENCES:
patent: 2867149 (1959-01-01), Goddard
patent: 5237404 (1993-08-01), Tanaka et al.
patent: 5309222 (1994-05-01), Kamei et al.

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