Higher power density downstream plasma

Electric heating – Metal heating – By arc

Reexamination Certificate

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Details

C219S121410, C219S121500, C156S345380

Reexamination Certificate

active

07015415

ABSTRACT:
A method and system to obtain a high power density plasma to efficiently generate high concentrations of plasma downstream from one or more plasma sources. A first embodiment of the invention involves a method to provide an improved power density for dissociating one or more gases to create plasma. A second embodiment of the invention involves a method to provide multiple chambers for dissociating one or more gases to create plasma. A third embodiment involves an apparatus using a constriction in a discharge chamber containing one or more gases, to provide an improved power density for dissociating one or more gases to create plasma. A fourth embodiment involves an apparatus using a constriction in multiple discharge chambers containing one or more gases, to provide an improved power density for dissociating one or more gases to create plasma.

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patent: 6207587 (2001-03-01), Li et al.
patent: 6255197 (2001-07-01), Fujimura et al.
patent: 6263831 (2001-07-01), Gorin
patent: 6267074 (2001-07-01), Okumura
patent: 0388800 (1990-09-01), None
patent: 0546852 (1993-06-01), None

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