High-yield spatial light modulator with light blocking layer

Details High-yield spatial light modulator with light blocking layer High-yield spatial light modulator with light blocking layer

1995-06-07

1997-01-28

Picardai, Kevin M.

Fishing, trapping, and vermin destroying

437 3, 437 4, 437 5, H01L 3118

Patent

active

055977367

ABSTRACT:
A semiconductor device with an optically active region which receives light, and has a layer of metal which blocks the light from the substrate. The substrate contains addressing circuitry which can experience current leakage if photocarriers are allowed to form by contact with light. A layer of metal is deposited as an integral part of the device to prevent the light from reaching the substrate.

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patent: 5273910 (1993-12-01), Tran et al.
Larry J. Hornbeck, "Deformable-Mirror Spatial Light Modulators," SPIE Critical Reviews Series, vol. 1150, Aug. 1989, pp. 86-102.

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