Fishing – trapping – and vermin destroying
Patent
1994-01-31
1995-07-11
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437912, 437944, 437947, H01L 2100
Patent
active
054321190
ABSTRACT:
Yields of FETs such as HEMTs are significantly improved by establishing an elongate gate contact opening in a patterning material with the patterning material over-hanging the opening along both its elongate sides and its ends. A contact metal is next evaporated both into the opening and onto the adjacent patterning material, with the overhang producing a continuous gap around the periphery of the gate contact between it and the metal on the adjacent patterning material. The adjacent metal is then lifted-off without disturbing the gate contact. The inward tapered profile in the elongate direction of the contact opening is achieved with multiple parallel e-beam scans, while a similar profile is achieved at the ends of the elongate scans by increasing the electron beam dose in the vicinity of the scan ends, preferably by scanning the beam at a substantial angle to the elongate direction near the ends of the opening.
REFERENCES:
patent: 4429452 (1984-02-01), Meignant
patent: 5171718 (1992-12-01), Ishibashi et al.
patent: 5185277 (1993-02-01), Tung et al.
patent: 5190892 (1993-03-01), Sano
patent: 5336626 (1994-08-01), Lee
Le Minh V.
Nguyen Loi D.
Denson-Low Wanda
Duraiswamy V. D.
Gurley Lynne A.
Hearn Brian E.
Hughes Aircraft Company
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