High voltage MOS transistor and production method thereof, and s

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357 59, H01L 2978

Patent

active

051403927

ABSTRACT:
A high voltage MOS transistor includes a semiconductor substrate (1) of a first semiconductor type, a gate electrode (14) formed on the semiconductor substrate via a gate oxide layer (13), first and second diffusion regions (15, 16) formed in the semiconductor substrate on both sides of the gate electrode and being of a second semiconductor type opposite to the first semiconductor type, and an electrode (38) which is directly connected to the first diffusion region (15) and is made up of a conductor layer (49) including polysilicon. An impurity concentration of the conductor layer (49) including the polysilicon is higher than an impurity concentration of the first diffusion region (15).

REFERENCES:
patent: 4546366 (1985-10-01), Buchanan
patent: 4949136 (1990-08-01), Jain

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