High-voltage liquid-cooled apparatus and supply leads therefor

Details High-voltage liquid-cooled apparatus and supply leads therefor High-voltage liquid-cooled apparatus and supply leads therefor

1974-10-01

1976-06-08

Grimley, Arthur T.

Electricity: conductors and insulators

With fluids or vacuum

With cooling or fluid feeding, circulating or distributing

174 15R, H01B 724

Patent

active

039625303

ABSTRACT:
In a high-voltage, liquid-cooled apparatus having at least one component, such as a cathode element of a reactive sputtering apparatus, which is connected both to a source of high voltage and a supply of cooling liquid, an electrical conductor for carrying the high voltage is accommodated with a cooling liquid supply pipe of insulating material. The conductor may be a wire or wire braid lying in the liquid supply pipe or a metal tube fitting closely within an outer electrically insulating sheath of the liquid supply pipe. Better contacts at the connectors and a reduced incidence of insulation breakdown can thus be achieved.

REFERENCES:
patent: 2483301 (1949-09-01), Roberds

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