High-voltage compatible, full-depleted CCD

Active solid-state devices (e.g. – transistors – solid-state diode – With means to control surface effects – Insulating coating

Reexamination Certificate

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Details

C257S519000, C257S400000, C257S460000, C257S447000, C257S442000, C257S452000

Reexamination Certificate

active

11357769

ABSTRACT:
A charge coupled device for detecting electromagnetic and particle radiation is described. The device includes a high-resistivity semiconductor substrate, buried channel regions, gate electrode circuitry, and amplifier circuitry. For good spatial resolution and high performance, especially when operated at high voltages with full or nearly full depletion of the substrate, the device can also include a guard ring positioned near channel regions, a biased channel stop, and a biased polysilicon electrode over the channel stop.

REFERENCES:
patent: 6025585 (2000-02-01), Holland
patent: 6259085 (2001-07-01), Holland
patent: 6917041 (2005-07-01), Doty et al.
patent: 2005/0139833 (2005-06-01), Janesick et al.
Holland, “High-Voltage Compatible, Fully Depleted CCD,” Lawrence Berkeley National Laboratory, Technology Transfer, web site 2 pages, (Sep. 22, 2004).
Holland et al., “Development of High-Voltage Compatible, Fully Depleted, Back-Illuminated Charge Coupled Devices,” Lawrence Berkeley National Laboratory, Engineering Division, p. 1-3, (Sep. 2004).
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