High-voltage amplifier with low output impedance

Amplifiers – With semiconductor amplifying device – Including signal feedback means

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Details

330 98, 330108, 330297, H03F 134, H03F 304

Patent

active

041930401

ABSTRACT:
The technical field to which this invention pertains is high-voltage amplifiers. The amplifier includes a high-voltage capacitor (C1) across which the output of the amplifier is developed. This capacitor is charged towards the supply potential (V) by a constant current generator (10). At the same time, the capacitor is continuously discharged by a controllable current generator (11). A voltage amplifier (13) connected to the input signal to be amplified and to a scaled-down version (R,R) of the output of the high-voltage amplifier, alters the rate at which the capacitor is discharged and, hence, the output voltage developed across the capacitor. The principal use of the invention is to drive the electrostatic deflection plates of an ion implantation machine or an electron beam milling apparatus. The invention may also be used to drive other highly capacitive loads, for example, piezo-electric crystal devices.

REFERENCES:
patent: 3679986 (1972-07-01), Zaman
patent: 3736519 (1973-05-01), Smyth
patent: 3868580 (1975-02-01), Battjes
patent: 3922585 (1975-11-01), Andrews
patent: 3940708 (1976-02-01), Sumi et al.
patent: 3968453 (1976-07-01), Hongu

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