High-vacuum valves

Valves and valve actuation – Reciprocating valve – Diaphragm

Patent

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Details

251176, F16K 716

Patent

active

051451522

ABSTRACT:
In a high-vacuum valve whose valve body is brought in and out of contact with a valve seat, a metal diaphragm facing the valve seat defines a valve seat, an actuating mechanism to open and close the valve body is provided on the reverse side of the diaphragm outside the valve chamber, and a spring is provided between the actuating mechanism and diaphragm in a position corresponding to the position of the valve seat. This high-vacuum valve eliminates the stagnation of gas in its passage, reduces the surface area of its passage, and precludes the detrimental effect of the powder of abraded metal.

REFERENCES:
patent: 4953826 (1990-09-01), Ohmi et al.

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