Valves and valve actuation – With correlated flow path – Pipe coupling or union
Patent
1997-06-06
1998-11-17
Lee, Kevin
Valves and valve actuation
With correlated flow path
Pipe coupling or union
251368, F16K 1736
Patent
active
058365680
ABSTRACT:
A high-vacuum valve in which a seal portion of the inner wall of an annular space for interposing a metallic annular gasket is subjected to an anodic oxidation coating treatment other than the sulfuric acid anodic oxidation coating treatment to enhance the compression strength of the seal portion and to prevent the seal portion from being damaged, deformed and sticking to the metallic annular gasket. The high-vacuum valve has a plurality of ports communicated with a valve chamber in a valve body through respective tubular portions. A valve seat is formed in a flow path connecting the valve chamber and one of the tubular portions. The flow path is closed by bringing a valve element into contact with the valve seat, and the flow path is opened by separating the valve element from the valve seat. An annular space for interposing a metallic annular gasket is formed at an end portion of a tubular portion of an aluminum alloy that forms a port, and a seal portion is formed on an inner wall that forms the annular space. The seal portion or the whole of the valve body is subjected to an oxalic acid anodic oxidation coating treatment, thereby enhancing the compression strength of the seal portion and preventing the seal portion from being damaged, deformed and sticking to the metallic annular gasket.
REFERENCES:
patent: 2571539 (1951-10-01), Christie
patent: 4121980 (1978-10-01), Gohausen et al.
patent: 5605174 (1997-02-01), Schlecht et al.
Ishigaki Tsuneo
Shibuya Keiichi
Lee Kevin
SMC Corporation
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