High-vacuum valve

Details High-vacuum valve High-vacuum valve

1999-04-26

2000-08-01

Chambers, A. Michael

Fluid handling

With heating or cooling of the system

With electric heating element

251167, F16L 5300

Patent

active

06095180&

ABSTRACT:
A high-vacuum valve arranged to prevent conduction of heat from a valve element to a low-temperature part through a valve shaft. After the valve element has been moved to a position facing opposite to a valve seat by rectilinear motion of the valve shaft, the valve element is pressed against the valve seat to close the valve by pivotal motion of the valve shaft. A heater is provided in the valve shaft in close contact with it. Wiring is connected to the heater to supply it with electric power from outside the high-vacuum valve.

REFERENCES:
patent: 3120944 (1964-02-01), Cogez et al.
patent: 4718637 (1988-01-01), Contin
patent: 5413139 (1995-05-01), Kusumoto et al.
patent: 5485542 (1996-01-01), Ericson
patent: 5531245 (1996-07-01), Sparks
patent: 5755255 (1998-05-01), Iwabuchi
patent: 5836568 (1998-11-01), Ishigaki et al.

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