Electricity: conductors and insulators – With fluids or vacuum – Boxes and housings
Patent
1991-08-29
1993-09-21
Picard, Leo P.
Electricity: conductors and insulators
With fluids or vacuum
Boxes and housings
174 524, H01L 2302
Patent
active
052471330
ABSTRACT:
An enclosure providing an evacuated region about an array of microelectronic vacuum devices including a substrate, a first encapsulation member defining a cavity, a second encapsulation member defining a cavity and mating with the first encapsulation member so as to define an encapsulated region, a ledge formed in the first encapsulation member for supporting the substrate and defining a communicating passage between the cavities and a sealing agent disposed between the mating surfaces of the encapsulation members to effect a vacuum seal such that when the encapsulated region is evacuated it will be at the same vacuum levels throughout to eliminate differential pressure induced deformation of the substrate. The evacuated substrate enclosure further provides for assembly without an evacuated environment.
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patent: 4326214 (1982-04-01), Trueblood
patent: 4780572 (1988-10-01), Kondo et al.
patent: 4897508 (1990-01-01), Mahuliker et al.
patent: 5013871 (1991-05-01), Mahuliker et al.
patent: 5023398 (1991-06-01), Mahuliker et al.
Jaskie James E.
Kane Robert C.
Summers John
Wiemann David A.
Motorola Inc.
Parsons Eugene A.
Picard Leo P.
Tone David A.
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