High vacuum pumping system

Details High vacuum pumping system High vacuum pumping system

1987-07-21

1988-02-02

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

55269, 62268, B01D 800

Patent

active

047221917

ABSTRACT:
High vacuum pumping system employs a poppet valve having dual seats for respectively seating a pair of vertically disposed spaced valve discs thereon to define a closed position. A refrigerated cold trap is located within a dome portion of the valve, i.e., above the upper of the valve discs while seated, and a diffusion pump is mounted below the valve to evacuate the vacuum process chamber when the discs are elevated or unseated to define an open position. The cold trap and diffusion pump are mounted in parallel and form a common axis with the poppet valve thereinbetween. Means are provided to equalize the pressures within the dome and vacuum process chamber when the discs are seated.

REFERENCES:
patent: 2879157 (1959-03-01), Batutis et al.
patent: 2985356 (1961-05-01), Beecher
patent: 3019809 (1962-02-01), Ipsen et al.
patent: 3392538 (1968-07-01), Mongodin
patent: 3797264 (1974-03-01), Thibault et al.
patent: 4072025 (1978-02-01), Thibault
patent: 4506513 (1985-03-01), Max
patent: 4541249 (1985-09-01), Graves et al.
See art cited in U.S. Ser. No. 908,490; copy of form PTO-892 herewith.

Affiliated with

Also associated with

Rating

High vacuum pumping system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with High vacuum pumping system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and High vacuum pumping system will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1630842