Pumps – Electrical or getter type – Getter heating – vaporizing – or regeneration
Patent
1991-08-20
1992-11-10
Smith, Leonard E.
Pumps
Electrical or getter type
Getter heating, vaporizing, or regeneration
F04B 3702
Patent
active
051619555
ABSTRACT:
A bulk getter-pump, consisting primarily of large beds of heated getter-material for use in pumping down in a high-vacuum environment. The pump is designed for applications now are served by turbo, cryo, diffusion, and ion pumps. The pump consists of a meshed cage filled with bulk getter-material pellets, which cage is housed in a housing coupled to a conduit of a vacuum chamber, so that the bulk getter-material is exposed to the interior of the vacuum chamber. In use, a roughing pump is first used to bring the chamber down to a pressure of about 10.sup.3 torr, and then the bulk getter-pump of the invention is operatively coupled to the chamber for sorbing gases, in order to reach a high vacuum.
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Carrea Giovanni
Danielson Philip
Benn Marvin N.
Danielson Associates, Inc.
Gerstein Milton S.
Smith Leonard E.
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