Metal working – Piezoelectric device making
Patent
1979-12-10
1981-11-17
Hall, Carl E.
Metal working
Piezoelectric device making
228 18, 228 441A, 228221, H01L 4122
Patent
active
043002722
ABSTRACT:
Disclosed is a semi-automatic processing system for the production of components requiring the deposition of metallization and assembly in an oil free ultra-high vacuum environment. The system is comprised of a plurality of interconnected tubular high vacuum chambers for separately performing ultra-violet cleaning, bake out, plating and sealing of, for example, quartz crystal resonator units, in an in-line configuration adapted for continuous cycle processing of components. The major elements of the system include: (a) a belt type transport which is adapted to convey one or more components through the respective chamber and into an adjoining chamber through an intermediate gate valve; (b) manipulators for handling the component parts inside the vacuum chambers; (c) long life highly directional evaporation sources for evaporated metal deposition on selected component parts; and (d) a sealing apparatus for hermetically sealing the components after evaporation without exposure to atmosphere. Each chamber accordingly is separated from all adjoining chambers by gate valves which make each chamber a self contained modular unit that, for ease of servicing, can be removed and/or inserted into the system without affecting the vacuum integrity of the other chambers.
REFERENCES:
patent: 3914836 (1975-10-01), Hafner et al.
patent: 3931388 (1976-01-01), Hafner et al.
patent: 4028135 (1977-06-01), Vig et al.
patent: 4125086 (1978-11-01), Vig et al.
"Quartz Crystal Fabrication Facility", by J. M. Frank et al.; General Eleic Publication; Nov. 1977.
Hafner Erich
Ney Robert J.
Edelberg Nathan
Hall Carl E.
Murray Jeremiah G.
Sachs Michael C.
The United States of America as represented by the Secretary of
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