High vacuum compatible air bearing stage

Details High vacuum compatible air bearing stage High vacuum compatible air bearing stage

1981-09-21

1983-11-29

Levy, Stuart S.

Cutlery

308 5R, F16C 3206, F16C 2902

Patent

active

044177704

ABSTRACT:
A high vacuum compatible X-Y positioning stage having an air bearing is provided. A pair of moveable carriages is mounted interior to an airtight chamber. Constraints allow movement of each carriage to only one horizontal direction, the directions of each carriage being orthogonal. Air inlet and outlet ports enter the chamber through apertures, and are mounted on the carriages and are moveable therewith. Airtight, flexible bellows form an airtight seal between the chamber and air ports at the apertures. Pressurized air communicated through the ports to the carriage is constrained to exit the carriage via small orifices about the exterior thereof to form an air bearing. The air is constrained to exit the airtight chamber through a passageway mounted in the carriage and leading to the outlet port. A stage is mounted on one pair of ports. The other pair is mounted in a fixed position. The stage is moveable in an X-Y plane vis-a-vis the fixed position on a compensated air bearing.

REFERENCES:
patent: 3209623 (1965-10-01), Schardt
patent: 3218108 (1965-11-01), Sazavsky
patent: 3520055 (1970-07-01), Jannett
patent: 3995502 (1976-12-01), Jones
patent: 4080009 (1978-03-01), Marathe et al.
patent: 4141456 (1979-02-01), Hart
patent: 4191385 (1980-03-01), Fox et al.

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