High vacuum capacitance manometer having Px side open housing

Details High vacuum capacitance manometer having Px side open housing High vacuum capacitance manometer having Px side open housing

1985-02-26

1986-05-13

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

361283, 73431, G01L 912

Patent

active

045878510

ABSTRACT:
A sensor unit for a high vacuum manometer includes a tensioned diaphragm fused on one side to a closed evacuated reference chamber and on the other side to a wall ring of substantially the same diameter as the diaphragm. A removable cap member with a gasket seats against the wall so as to define a pressure receiving chamber bordering the diaphragm. With the cap removed, the surfaces of the diaphragm and ring are all accessible for solvent cleaning and visual inspection, so that the sensor may be repeatedly and reliably decontaminated and the diaphragm restored to its initial characteristics. A method of assembly and cleaning are also shown.

REFERENCES:
patent: 3713341 (1973-01-01), Madsen et al.
patent: 3808480 (1974-04-01), Johnston
patent: 4380041 (1983-04-01), Ho
Reliability of a Capacitance Manometer in the Range of 2.times.10.sup.-4 -5.times.10.sup.-6 Torr., G. Loriot and T. Moran, 140, Rev. Sci. Instrum., vol. 46, No. 2, Feb. 1975.
Modern Capacitance Manometers, John J. Sullivan, 22, Transducer Technology, Jul./Aug. 1979.
Use of the Capacitance Manometer Gauge in Vacuum Freeze-Drying, J. Grant Armstrong, 473, J. Parenteral Drug Assoc., Nov./Dec. 1980.
Catalog/Spec. Sheet for MKS Instruments, Inc.--Baratron 200 Series Differential Transducers.
Catalog/Spec. Sheet for MKS Instruments, Inc.--Pressure and Flow Control Systems for Semiconductor Processing.
Technical note re: Diametrics 600 Sensor Unit in: 103 Control Engineering, Jan. 1985.
Spec. Sheet for Fluid Precision, Inc.--Capacitron Type 150 Absolute Vacuum/Pressure Transducer.

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