Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1995-07-24
1997-07-29
Grimley, Arthur T.
Photocopying
Projection printing and copying cameras
Step and repeat
355 54, 355 50, 355 72, G03B 2742, G03B 2744, G03B 2748
Patent
active
056526458
ABSTRACT:
A projection imaging system is described for patterning large, flexible substrates at high exposure speeds and desired resolution, the substrates being in the form of a continuous band fed from a roller for cost-effective electronic module manufacturing. From the continuous band, segments of one panel size are sequentially exposed one at a time. The segment being exposed is held rigidly on a scanning stage, on which is also mounted a mask containing the pattern to be formed on the substrate. The imaging subsystem is stationary and situated above the scanning stage. The mask is illuminated with a hexagonal illumination beam and a region of similar shape is imaged on the substrate. The stage is programmed to scan the mask and substrate simultaneously across the hexagonal regions so as to pattern one whole panel. Provision is made for suitable overlap between the complementary intensity profiles produced by the hexagonal illumination, which ensures seamless joining of the scans and uniform patterning of an entire panel without image stitching errors. For handling the roll substrate so that the substrate segment being exposed remains held rigidly to the scanning stage while the stage moves it in two dimensions without damaging the integrity of the substrate band, mechanisms are provided in the projection system which include provision of managed slack lengths in the substrate band, controlled rotary motions of the supply and take-up substrate rollers, and synchronized, laterally sliding assemblies for the rollers.
REFERENCES:
patent: 5198857 (1993-03-01), Goto
patent: 5291240 (1994-03-01), Jain
patent: 5563095 (1996-10-01), Frey
Anvik Corporation
Grimley Arthur T.
Kerner Herbert V.
Kling Carl C.
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