High throughput electron energy analyzer

Details High throughput electron energy analyzer High throughput electron energy analyzer

1995-10-30

1996-12-10

Berman, Jack I.

Radiant energy

Electron energy analysis

H01J 4946

Patent

active

055833365

ABSTRACT:
A charged particle energy analyzer having higher sensitivity than conventional analyzers inserts a substantially parallel beam of charged particles into a uniform magnetic field at an angle to the field direction. The charged particles travel along the field direction and rotate perpendicular to it, forming helical trajectories. After traveling a given distance in the field direction, the total rotation each charged particle has undergone is measured. Because the total rotation is uniquely related to the energy of the particle, a spectrum showing the energy distribution of all the particles in the beam can be derived from these measurements. The enhanced sensitivity of this analyzer results from its ability to simultaneously analyze all the particles in a beam having a large energy spread.

REFERENCES:
patent: 3822382 (1974-07-01), Koike
patent: 4810883 (1989-03-01), Turner
patent: 5017779 (1991-05-01), Smith et al.
Avignone et al., Nuclear Instruments and Methods, vol. 107, No. 3, Mar. 1973, pp. 453-459.

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