High throughout image for processing inspection images

Details High throughout image for processing inspection images High throughout image for processing inspection images

2007-05-08

2007-05-08

Bali, Vikkram (Department: 2624)

Image analysis

Applications

Manufacturing or product inspection

C382S144000, C382S152000

Reexamination Certificate

active

10860617

ABSTRACT:
Disclosed is an image processing system for analyzing images of a specimen to determine whether the specimen contains defects. The system includes a plurality of processors for receiving image data from a specimen and for analyzing one or more selected patch(es) of such image data to determine whether the specimen has a defect. The system also includes a plurality of buses for coupling the processors together, wherein the bus has the following specifications: a data rate of about 50 gigabits per second or more and an error rate less than about 10−16. In one implementation, the buses are low voltage differential signal type buses, and in another implementation, the buses are hyper transport type buses.

REFERENCES:
patent: 3887762 (1975-06-01), Uno et al.
patent: 4174514 (1979-11-01), Sternberg
patent: 4181936 (1980-01-01), Kober
patent: 4253112 (1981-02-01), Doemens
patent: 4445137 (1984-04-01), Panofsky
patent: 4484081 (1984-11-01), Cornyn et al.
patent: 4484349 (1984-11-01), McCubbrey
patent: 4589140 (1986-05-01), Bishop et al.
patent: 4850027 (1989-07-01), Kimmel
patent: 4953224 (1990-08-01), Ichinose et al.
patent: 4979223 (1990-12-01), Manns et al.
patent: 4984282 (1991-01-01), Manns et al.
patent: 4985927 (1991-01-01), Norwood et al.
patent: 4999785 (1991-03-01), Schmuter
patent: 5001764 (1991-03-01), Wood et al.
patent: 5018212 (1991-05-01), Manns et al.
patent: 5046110 (1991-09-01), Carucci et al.
patent: 5095447 (1992-03-01), Manns et al.
patent: 5119434 (1992-06-01), Bishop et al.
patent: 5315700 (1994-05-01), Johnston et al.
patent: 5355508 (1994-10-01), Kan
patent: 5357632 (1994-10-01), Pian et al.
patent: 5434629 (1995-07-01), Pearson et al.
patent: 5495337 (1996-02-01), Goshorn et al.
patent: 5517234 (1996-05-01), Gerber et al.
patent: 5537669 (1996-07-01), Evans et al.
patent: 5581777 (1996-12-01), Kim et al.
patent: 5608453 (1997-03-01), Gerber et al.
patent: 5621811 (1997-04-01), Roder et al.
patent: 5659630 (1997-08-01), Forslund
patent: 6081659 (2000-06-01), Garza et al.
patent: 6130967 (2000-10-01), Lee et al.
patent: 6366687 (2002-04-01), Aloni et al.
patent: 6578961 (2003-06-01), Vaez-Iravani
patent: 6738506 (2004-05-01), Miller et al.
patent: 2002/0051565 (2002-05-01), Hiroi et al.
patent: 2002/0114506 (2002-08-01), Hiroi et al.
patent: 2003/0192006 (2003-10-01), Coakeley et al.
patent: WO 98/01827 (1998-01-01), None
patent: WO 00/68884 (2000-11-01), None
Goldberg, et al., “Method and Apparatus for Inspecting Reticles Implementing Parallel Processing,” U.S. Appl. No. 09/449,022, filed Nov. 24, 1999. 46 pages.
Office Action, dated Oct. 30, 2002, for Goldberg, et al, “Method and Apparatus for Inspecting Reticles Implementing Parallel Processing”, U.S. Appl. No. 09/449,022.
Office Action, dated May 8, 2005, for Goldberg, et al, “Method and Apparatus for Inspecting Reticles Implementing Parallel Processing”, U.S. Appl. No. 09/449,022.
Office Action, dated Jul. 29, 2003, for Goldberg, et al, “Method and Apparatus for Inspecting Reticles Implementing Parallel Processing”, U.S. Appl. No. 09/449,022.
Office Action, dated Jan. 23, 2004, for Goldberg, et al, “Method and Apparatus for Inspecting Reticles Implementing Parallel Processing”, U.S. Appl. No. 09/449,022.
Office Action, dated Jul. 1, 2004, for Goldberg, et al, “Method and Apparatus for Inspecting Reticles Implementing Parallel Processing”, U.S. Appl. No. 09/449,022.
Office Action, dated Apr. 29, 2005, for Goldberg, et al, “Method and Apparatus for Inspecting Reticles Implementing Parallel Processing”, U.S. Appl. No. 09/449,022.

Affiliated with

Also associated with

Rating

High throughout image for processing inspection images does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with High throughout image for processing inspection images, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and High throughout image for processing inspection images will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3748556