High temperature superconductor/insulator composite thin films w

Active solid-state devices (e.g. – transistors – solid-state diode – Thin active physical layer which is – Tunneling through region of reduced conductivity

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257 34, 505190, H01L 2906

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active

058892893

ABSTRACT:
High temperature superconductor composite thin film devices with easily moved Josephson vortices are described having high T.sub.c and good magnetic vortex properties. A preferred composite material was YBCO/CeO.sub.2 thin film on a MgO substrate. The superconductor composites were preferably formed by off-axis co-sputtering. A surprising recovery in properties was seen after plasma etching with oxygen.

REFERENCES:
patent: 4025844 (1977-05-01), Deutshcer
patent: 5667650 (1997-09-01), Face et al.
patent: 5736489 (1998-04-01), Kozlowski
Cukauskas, E.J. and Allen L.H., "Off-Axis Co-Sputtered YBCO and Ce.sub.2 O hin Films" Abstract distributed at 1996 Applied Superconductivity Conference, Pittsburg, PA Aug. 25-30, 1996.
Cukauskas, E.J. and Allen L.H., "Y.sub.1 Ba.sub.2 Cu.sub.3 O.sub.7-x and LaAlO.sub.3 Composite Thin Films by Off-Axis Magnetron Sputtering" Appl. Phys. Lett. 60(3), 20 Jan. 1992, pp. 389-391.

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