High temperature SiC thin film thermistor

Details High temperature SiC thin film thermistor High temperature SiC thin film thermistor

1989-04-20

1990-11-06

Reynolds, Bruce A.

Electrical resistors

Resistance value responsive to a condition

Current and/or voltage

338225D, 338307, H01C 710

Patent

active

049689649

ABSTRACT:
A thin film thermistor which includes an insulating substrate (21A), a Au-Pt fired electrode film (22A) in a particular comb-shaped pattern on the insulating substrate, with a little amount of oxide being added in the electrode film (22A), and a SiC thin film (23A) which is formed by sputtering on the substrate (21A) on which the electrode film (22A) is previously formed.

REFERENCES:
patent: 4359372 (1982-11-01), Nagai et al.
patent: 4424507 (1984-01-01), Nagai et al.

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