High temperature pressure transducer employing a metal...

Details High temperature pressure transducer employing a metal... High temperature pressure transducer employing a metal...

2006-06-15

2010-06-08

Lee, Kyung (Department: 2833)

Electrical resistors

Strain gauge type

C338S004000, C338S047000, C073S576000, C073S718000

Reexamination Certificate

active

07733209

ABSTRACT:
A pressure transducer includes a diaphragm, having an active region, and capable of deflecting when a force is applied to the diaphragm; and a sensor array disposed on a single substrate, the substrate secured to the diaphragm, the sensor array having a first outer sensor near an edge of the diaphragm at a first location and on the active region, a second outer sensor near an edge of the diaphragm at a second location and on the active region, and at least one center sensor substantially overlying a center of the diaphragm, the sensors connected in a bridge array to provide an output voltage proportional to the force applied to the diaphragm. The sensors are dielectrically isolated from the substrate.

REFERENCES:
patent: 5286671 (1994-02-01), Kurtz et al.
patent: 5973590 (1999-10-01), Kurtz et al.
patent: 6330829 (2001-12-01), Kurtz et al.
patent: 6595066 (2003-07-01), Kurtz et al.

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