High-temperature pressure sensor

Details High-temperature pressure sensor High-temperature pressure sensor

2008-01-01

2008-01-01

Allen, Andre J. (Department: 2855)

Measuring and testing

Fluid pressure gauge

Photoelectric

C073S754000

Reexamination Certificate

active

11509397

ABSTRACT:
A high-temperature pressure sensor that includes a dielectric layer. The pressure sensor also includes a substrate capable of withstanding temperatures greater than 450° C. without entering a phase change, at least one semiconducting material deposited on the sapphire substrate, and a silicon dioxide layer deposited over the semiconducting material. One aspect of the pressure sensor includes a second semiconducting material.

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