High temperature pressure sensing system

Details High temperature pressure sensing system High temperature pressure sensing system

2007-06-19

2007-06-19

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S753000, C073S754000

Reexamination Certificate

active

11234724

ABSTRACT:
A high temperature pressure sensing system (transducer) including: a pressure sensing piezoresistive sensor formed by a silicon-on-insulator (SOI) process; a SOI amplifier circuit operatively coupled to the piezoresistive sensor; a SOI gain controller circuit including a plurality of resistances that when selectively coupled to the amplifier adjust a gain of the amplifier; a plurality of off-chip contacts corresponding to the resistances, respectively, for electrically activating the corresponding resistances and using a metallization layer for the SOI sensor and SOI ASIC suitable for high temperature interconnections (bonding); wherein the piezoresistive sensor, amplifier circuit and gain control circuit are suitable for use in environments having a temperature greater than 175 degrees C. and reaching between 250° C. and 300° C., and wherein the entire transducer has a high immunity to nuclear radiation.

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