Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – With means to prevent contact from penetrating shallow pn...
Patent
1994-02-16
1995-05-09
Carroll, J.
Active solid-state devices (e.g., transistors, solid-state diode
Combined with electrical contact or lead
With means to prevent contact from penetrating shallow pn...
257741, 257751, 257764, 257770, H01L 2348, H01L 2940, H01L 2996, H01L 2962
Patent
active
054143012
ABSTRACT:
A semiconductor integrated circuit device is provided with an electrical interconnect system which is stable at high temperatures. The interconnect system employs refractory metal compounds which are electrically conductive, which form stable couples with silicon and compounds thereof, and which remain stable at temperatures exceeding approximately 500.degree. C.
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Carroll J.
Murray William H.
National Semiconductor Corporation
Robinson Stephen R.
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