High temperature interconnect system for an integrated circuit

Details High temperature interconnect system for an integrated circuit High temperature interconnect system for an integrated circuit

1987-08-18

1990-04-24

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437190, 437195, 437200, 148DIG133, H01L 21283

Patent

active

049200712

ABSTRACT:
A semiconductor integrated circuit device is provided with an electrical interconnect system which is stable at high temperatures. The interconnect system employs refractory metal compounds which are electrically conductive, which form stable couples with silicon and compounds thereof, and which remain stable at temperatures exceeding approximately 500.degree. C.

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