High temperature DC chucking and RF biasing cable with high...

Electricity: conductors and insulators – Conduits – cables or conductors – Insulated

Reexamination Certificate

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C174S12000C

Reexamination Certificate

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06875927

ABSTRACT:
A high temperature cable includes wire bundle having a plurality of copper strands, where each copper strand has a barrier coating and an anti-oxidation coating disposed thereon. A mica-based layer is wrapped around a length of the wire bundle and a fiberglass layer is disposed over the mica-based layer.

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C & M Corporation, Engineering Design Guide, (3rd Edition), Jan. 1992, pp. 2-8.

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