High stroke pixel for a deformable mirror

Details High stroke pixel for a deformable mirror High stroke pixel for a deformable mirror

2005-09-20

2005-09-20

Epps, Georgia (Department: 2873)

Optical: systems and elements

Deflection using a moving element

Using a periodically moving element

C359S224200

Reexamination Certificate

active

06947188

ABSTRACT:
A mirror pixel that can be fabricated using standard MEMS methods for a deformable mirror. The pixel is electrostatically actuated and is capable of the high deflections needed for spaced-based mirror applications. In one embodiment, the mirror comprises three layers, a top or mirror layer, a middle layer which consists of flexures, and a comb drive layer, with the flexures of the middle layer attached to the mirror layer and to the comb drive layer. The comb drives are attached to a frame via spring flexures. A number of these mirror pixels can be used to construct a large mirror assembly. The actuator for the mirror pixel may be configured as a crenellated beam with one end fixedly secured, or configured as a scissor jack. The mirror pixels may be used in various applications requiring high stroke adaptive optics.

REFERENCES:
patent: 5969848 (1999-10-01), Lee et al.
patent: 6498870 (2002-12-01), Wu et al.
patent: 2003/0142934 (2003-07-01), Pan et al.
patent: 2003/0156315 (2003-08-01), Li et al.

Affiliated with

Also associated with

Rating

High stroke pixel for a deformable mirror does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with High stroke pixel for a deformable mirror, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and High stroke pixel for a deformable mirror will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3374087