Optical: systems and elements – Mirror – With support
Reexamination Certificate
2007-09-28
2010-12-21
Allen, Stephone B (Department: 2872)
Optical: systems and elements
Mirror
With support
C279S146000
Reexamination Certificate
active
07854524
ABSTRACT:
Systems and methods of providing support to a mirror assembly including a high-stiffness, low mass structure. An L-shaped support, in conjunction with a shelf member and a plurality of fingers, provides support to a chuck upon which an operation (such as a wafer inspection) can be carried out. Materials such as ALBEMET and INVAR can be used to reduce mass and increase stiffness to avoid resonance in the system. Sensors and actuators can be employed to sense input energy and adjust the structure, respectively, if resonance is deemed likely.
REFERENCES:
patent: 5028797 (1991-07-01), Abe et al.
patent: 5206702 (1993-04-01), Kato et al.
patent: 5421916 (1995-06-01), Nachtrab et al.
patent: 5621491 (1997-04-01), Ohishi et al.
patent: 5917580 (1999-06-01), Ebinuma et al.
patent: 6285444 (2001-09-01), Osanai et al.
patent: 6330837 (2001-12-01), Charles et al.
patent: 6567212 (2003-05-01), Engelhardt et al.
patent: 6891601 (2005-05-01), Jeanne et al.
patent: 7031055 (2006-04-01), Engelhardt et al.
patent: 7164853 (2007-01-01), Tomita
patent: 7307784 (2007-12-01), Kinoshita et al.
patent: 7315412 (2008-01-01), Kinoshita et al.
Caracci Joseph
Garzon Guillermo
Mehta Sharad
Allen Stephone B
Anorad Corporation
Chwasz Jade R
Miller John M.
Speroff R. Scott
LandOfFree
High stiffness low mass supporting structure for a mirror... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with High stiffness low mass supporting structure for a mirror..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and High stiffness low mass supporting structure for a mirror... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4153478