Oscillators – Electromechanical resonator
Patent
1989-03-23
1994-11-01
Grimm, Siegfried H.
Oscillators
Electromechanical resonator
310 15, 310348, 310357, 310366, 310368, 331163, H01L 4100, H03B 530
Patent
active
053610458
ABSTRACT:
A preferred embodiment of a resonator embodying the invention comprises entially a resonating plate, an action electrode and a detection electrode, and a supporting base. The electrodes are placed facing symmetrical narrow edges of the plate, opposite vibration loops, and are coupled to the plate by capacitive, electrostrictive or piezoelectric effect according to the material of which the plate is comprised. A very wide range of elastic solid materials can be used to embody the resonating plate. The plate is attached to the supporting base at points corresponding to vibration nodes of the plate. The plate vibrates advantageously according to a contour mode called Lame mode. High coefficients of quality in the region of 10.sup.7 are obtained. The resonators embodying the invention can be easily integrated. To do so, the plate is e.g. embodied in silicon. Such a resonator is included in a high-stability oscillating loop comprising a phase shifter and an amplifier.
REFERENCES:
patent: 2998575 (1961-08-01), Mason
patent: 4567451 (1986-01-01), Greenwood
Beaussier Jacques
Breuzet Michel
Gay Michel
Uebersfeld Jean
Grimm Siegfried H.
Office National d'Etudes et de Recherches Aerospatiales styled O
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