High-speed x-ray inspection apparatus and method

X-ray or gamma ray systems or devices – Specific application – Absorption

Reexamination Certificate

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Details

C378S098120, C378S197000, C378S207000, C382S149000, C382S150000, C382S219000, C382S220000

Reexamination Certificate

active

06895073

ABSTRACT:
An apparatus and method for inspecting parts. The apparatus includes an x-ray source for illuminating a part from a plurality of locations with respect to the part and an imaging detector for forming a plurality of measured x-ray images of the part, one such measured x-ray image corresponding to each of the illumination locations. A controller compares each of the measured x-ray images with a corresponding calibration image. The controller provides a defective part indication if one of the measured x-ray images differs from the corresponding calibration image by more than a threshold value in part of the measured x-ray image. The controller localizes defects on the part by comparing two or more of the measured x-ray images with two or more corresponding calibration images. The calibration images can be constructed from measured images of defect free parts.

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Hanke, R.F. et al., “Automated 3D X-Ray Inspection of Fine Pitch PCB's”, IEEE/CHMT Intl. Electronics Manufacturing Technology Symposium, Sept. 28, 1992, pp. 187-190.

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