High-speed soft evacuation process and system

Details High-speed soft evacuation process and system High-speed soft evacuation process and system

1998-05-19

2000-06-27

Warden, Sr., Robert J

Semiconductor device manufacturing: process

Chemical etching

Vapor phase etching

141 65, 141 66, 141 8, 118715, 118719, 156345, C23F 102, F16G 500

Patent

active

060806796

ABSTRACT:
A process for evacuating the inside of a vacuum vessel before a processing gas is introduced into the vacuum vessel. The process includes steps of evacuating the inside of the vacuum vessel through a by-pass evacuation path such that a pressure reduction rate of the pressure inside the vacuum vessel is gradually reduced immediately after the start of evacuation, and opening an evacuation conductance control valve, provided in a principal evacuation path, during or after the evacuation step such that conductance of the evacuation conductance control valve is gradually increased with an elapse of evacuation time. The timing at which the evacuation conductance control valve is started to be opened is controlled so that a pressure reduction rate curve of the pressure inside the vacuum vessel has a minimum value and a maximum value. The minimum value becomes 0.2 times or more a value given immediately after the start of evacuation and the maximum value becomes not greater than the value given immediately after the start of evacuation.

REFERENCES:
patent: 5223001 (1993-06-01), Saeki
patent: 5223039 (1993-06-01), Suzuki
patent: 5242539 (1993-09-01), Kumihashi et al.
patent: 5340460 (1994-08-01), Kobayashi et al.
patent: 5433238 (1995-07-01), Cannizzaro et al.
patent: 5538699 (1996-07-01), Suzuki
patent: 5556473 (1996-09-01), Olson et al.
patent: 5803975 (1998-09-01), Suzuki
patent: 5951835 (1999-09-01), Namiki et al.
patent: 5981399 (1999-11-01), Kawamura et al.

Affiliated with

Also associated with

Rating

High-speed soft evacuation process and system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with High-speed soft evacuation process and system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and High-speed soft evacuation process and system will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1784625