Electrical generator or motor structure – Dynamoelectric – Linear
Patent
1998-09-18
2000-11-07
Ramirez, Nestor
Electrical generator or motor structure
Dynamoelectric
Linear
355 53, 355 72, H01L 2100
Patent
active
06144118&
ABSTRACT:
A high-speed precision positioning apparatus has a stage supported by a platen. The stage is driven by a plurality of drive motors that are co-planar with the stage and arranged symmetrically around the stage. The drive motors apply drive forces directly to the stage without any mechanical contact to the stage. The drive forces impart planar motion to the stage in at least three degrees of freedom of motion. In the remaining three degrees of freedom the motion is constrained by a plurality of fluid bearings that operate between the stage and the platen. The drive motors are configured as magnets, attached to the stage, moving in a gap formed in-between top and bottom stationary coils. Integral force cancellation is implemented by a force cancellation system that applies cancellation forces to the stage. The cancellation forces, which are co-planar with a center of gravity of the stage and any components that move with the stage, cancel forces generated by planar motion of the stage. Interferometric encoders are used as position detectors.
REFERENCES:
patent: Re27436 (1972-07-01), Sawyer
patent: 3791739 (1974-02-01), Kawasaki
patent: 3864564 (1975-02-01), Adkins
patent: 3906262 (1975-09-01), Shichida et al.
patent: 3935486 (1976-01-01), Nagashima
patent: 4019109 (1977-04-01), McCoy et al.
patent: 4282469 (1981-08-01), Moriyama
patent: 4425537 (1984-01-01), Phillips et al.
patent: 4455512 (1984-06-01), Cornwell et al.
patent: 4464030 (1984-08-01), Gale et al.
patent: 4485339 (1984-11-01), Trost
patent: 4560911 (1985-12-01), Chitayat
patent: 4621926 (1986-11-01), Merry et al.
patent: 4654571 (1987-03-01), Hinds
patent: 4742286 (1988-05-01), Phillips
patent: 4776701 (1988-10-01), Pettigrew
patent: 4808892 (1989-02-01), Dreibelbis
patent: 4859974 (1989-08-01), Kliman et al.
patent: 4952858 (1990-08-01), Galburt
patent: 4984891 (1991-01-01), Miyazaki et al.
patent: 5000573 (1991-03-01), Suzuki et al.
patent: 5049796 (1991-09-01), Seraji
patent: 5066131 (1991-11-01), Iwata et al.
patent: 5098190 (1992-03-01), Wijntjes et al.
patent: 5126648 (1992-06-01), Jacobs
patent: 5153494 (1992-10-01), Hollis, Jr.
patent: 5196745 (1993-03-01), Trumper
patent: 5208497 (1993-05-01), Ishii et al.
patent: 5294854 (1994-03-01), Trumper
patent: 5334892 (1994-08-01), Chitayat
patent: 5446542 (1995-08-01), Muraoka
patent: 5486923 (1996-01-01), Mitchell et al.
patent: 5504407 (1996-04-01), Wakui et al.
patent: 5528118 (1996-06-01), Lee
patent: 5548195 (1996-08-01), Doran
patent: 5559600 (1996-09-01), Mitchell
patent: 5574556 (1996-11-01), Mori et al.
patent: 5648690 (1997-07-01), Hinds
patent: 5650853 (1997-07-01), Honda et al.
patent: 5666196 (1997-09-01), Ishii et al.
patent: 5708319 (1998-01-01), Ban et al.
patent: 5751585 (1998-05-01), Cutler et al.
patent: 5757149 (1998-05-01), Sato et al.
patent: 5757160 (1998-05-01), Kreuzer
patent: 5764361 (1998-06-01), Kato et al.
patent: 5780943 (1998-07-01), Ono
patent: 5847960 (1998-12-01), Cutler et al.
McCarthy, "Accuracy in Positioning Systems", Motion Control Technology Conference Proceedings, 15 pages, Mar. 19-21, 1991.
McCarthy, "Positioning Systems: An Overview", pp. 1-21, undated.
Meckl et al., "Experimental Evaluation of Shaped Inputs to Reduce Vibration for a Cartesian Robot", J. of Dynamic Systems, Measurement, and Control, 112:159-165, Jun. 1990.
Mekid et al., "Conceptual Design and Study of High Precision Translational Stages: Application to an Optical Delay Line", Precision Engineering, 21:29-35, 1997. Month Unknown.
Ryu et al., "Optimal Design of a Flexure Hinge Based XY.crclbar. Wafer Stage", Precision Engineering, 21:18-28, 1997. Month Unknown.
International Standard, ISO 8569, Mechanical Vibration and Shock--Measurement and Evaluation of Shock and Vibration Effects on Sensitive Equipment in Buildings, Second Edition, 1996. Month Unknown.
Lee et al., A Long Stroke and Ultra Precision XY.crclbar. Stage Using Simple Linear DC servo Actuators, American Society for Precision Engineering, 1997 Proceedings Vol. 16, pp. 341-344, month unknown.
Judell et al., "The Design of Vibration Control Solutions For Semiconductor Lithography and Inspection Equipment," Integrated Dynamics Engineering (1997), month unknown.
"Nanometer Precision in Positioning Control" dSpace News, p. 4, Fall 1998, month unknown.
Holmes et al., Atomic-Scale Precision Motion Control Stage (The Angstrom Stage), Annals of the CIRP, vol. 44/Jan. 1995, pp. 455-460, month unknown.
Williams et al., "Magnetic Bearing Stage for Photolithography", Annals of the CIRP vol. 42/Jan. 1993, pp. 607-610.
OPTRA, NanoGrid XY Metrology System: Model A (High Resolution), OPTRA, Inc., Jan. 1998.
OPTRA, The NanoGrid.TM. Principle of Measurement, OPTRA, Inc., Oct. 1997.
Linear Micro Encoder, 5T16 Series, MicroE ISO 9001 Registered, http://www.micro-e.com/lme.htm, Feb. 24, 1998.
Cahill Steven P.
Hunter Bradley L.
General Scanning Inc.
Jones Judson H.
Ramirez Nestor
LandOfFree
High-speed precision positioning apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with High-speed precision positioning apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and High-speed precision positioning apparatus will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1644278