High speed positive photoresist composition

Details High speed positive photoresist composition High speed positive photoresist composition

1975-09-22

1977-02-22

Bowers, Jr., Charles L.

Gas separation: apparatus

Electric field separation apparatus

Electrode cleaner, apparatus part flusher, discharger, or...

96 36, 96 362, 96 363, 96 49, 96 75, 96 91D, G03C 154, G03F 708

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active

040090337

ABSTRACT:
A positive photoresist having increased sensitivity to light and formed by the addition of an acidic compound to a 1,2-quinone-diazide sulphonic acid ester sensitizer.

REFERENCES:
patent: 3046121 (1962-07-01), Schmidt
patent: 3615532 (1971-10-01), Silver
patent: 3661582 (1972-05-01), Broyde
patent: 3666473 (1972-05-01), Colom et al.
patent: 3759711 (1973-09-01), Rauner et al.
patent: 3869292 (1975-03-01), Peters
"IBM Tech. Disclosure Bulletin", vol. 13, No. 4, p. 903, Sept. 1970.
Chemical Abstracts, 68: P25,445r, 1968.
Chemical Abstracts, 75: PG9,543v, 1971.
Chemical Abstracts, 78: P77327e, 1973.
Chemical Abstracts, 79: P72306b, 1973.
Chemical Abstracts, 81: P8437r, 1974.
Chemical Abstracts, 81: P56690q, 1974.

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