High speed interconnect system with refractory non-dogbone conta

Details High speed interconnect system with refractory non-dogbone conta High speed interconnect system with refractory non-dogbone conta

1987-03-10

1989-07-11

Kucia, R. R.

Electricity: electrical systems and devices

Safety and protection of systems and devices

With specific current responsive fault sensor

357 232, 357 233, 361411, H01L 2906

Patent

active

048476749

ABSTRACT:
An interconnect (16', 18', 18"), whose interlevel contacts comprise refractory (10) to refractory or refractory to semiconductor substrate (13) interfaces, comprises patterned refractory core portions (10), consisting of tungsten or molybdenum, having top portions (10a) and opposed side portions (10b), provided with sidewall spacers (32a) of aluminum, gold or copper or alloys thereof and formed on surface (12a) of insulating layers (12). The sidewall spacers afford lateral low resistivity cladding of the refractory portions as well as suppression of the electromigration failure modes of voiding and whiskering, while leaving the top portion of the core portions available for refractory to refractory contacts and the bottom portion of the core portions available for refractory to refractory or refractory to silicon contacts. In this manner, an interconnect system is provided which has low electrical resistivity but which avoids the much poorer electromigration performance associated with aluminum to aluminum, aluminum to silicon, or aluminum to refractory contact-making as well as with industry-standard bilayer structures comprising refractory/aluminum for interconnect-making.

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