Optics: measuring and testing – By particle light scattering – With photocell detection
Patent
1997-08-21
1999-04-06
Turner, Samuel A.
Optics: measuring and testing
By particle light scattering
With photocell detection
356357, G01B 902
Patent
active
058925830
ABSTRACT:
Embodiments of the present invention are inspection methods and inspection apparatus using superbroad radiation. In particular, an embodiment of the present invention is an inspection apparatus which comprises: (a) a source of radiation which outputs superbroad inspection radiation and superbroad reference radiation; (b) an inspection applicator apparatus which applies the inspection radiation as input to the sample; (c) an inspection collection apparatus which collects at least a portion of the inspection radiation that is scattered by the sample and applies at least a portion of the scattered inspection radiation as input to a dispersal apparatus; and (d) a reference collection and delay apparatus which produces a predetermined number of reference radiation outputs having predetermined delays with respect to one another and applies the reference radiation outputs as inputs to the dispersal apparatus; wherein the dispersal apparatus applies radiation from the scattered inspection radiation as input to a coherence processor and applies radiation from the reference radiation outputs as input to the coherence processor.
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