Optics: measuring and testing – By particle light scattering – With photocell detection
Patent
1997-08-21
2000-01-11
Turner, Samuel A.
Optics: measuring and testing
By particle light scattering
With photocell detection
356359, G01B 902
Patent
active
060142146
ABSTRACT:
Embodiments of the present invention are inspection methods and inspection apparatus for high speed, high precision inspection using parallel processing. In particular, an embodiment of a first aspect of the present invention is an inspection apparatus for inspecting a sample that uses parallel processing and which comprises: (a) a source of radiation which outputs superbroad inspection radiation having a frequency spectrum with an inspection width and reference radiation; (b) an inspection applicator apparatus which applies the inspection radiation as input to the sample; (c) an inspection collector apparatus which collects at least a portion of the inspection radiation that is scattered by the sample and applies at least a portion of the scattered inspection radiation as input to a dispersal apparatus; (d) wherein the dispersal apparatus applies radiation from the scattered inspection radiation as input to a plurality of coherence processors and applies radiation from the reference radiation as input to the plurality of coherence processors; and (e) a processor that fourier analyzes outputs from the coherence processors.
REFERENCES:
patent: 4340306 (1982-07-01), Balasubramanian
patent: 4928005 (1990-05-01), Lefevre et al.
patent: 5317369 (1994-05-01), Hochberg et al.
patent: 5321501 (1994-06-01), Swanson et al.
patent: 5579112 (1996-11-01), Sugiyama et al.
High resolution optical ranging system by H. Park, M. Chodorow, and R. Kompfner, Applied Optics, vol. 20, No. 14, Jul. 15, 1981, pp. 2389-2394.
Waveguide optical switch in InGaAsP/InP using free-carrier plasma dispersion by O. Mikami and H. Nakagone, Electron. Lett., vol. 20, No. 6, Mar. 1984, p. 228.
Optical coherence-domain reflectometry: a new optical evaluation technique by R.C. Youngquist, S. Carr, and D.E.N. Davies, Optics Letters, vol. 12, No. 3, Mar. 1987, pp. 158-160.
New measurement system for fault location in optical waveguide devices based on an interferometric technique by K. Takada, I. Yokohama, K. Chida, and J. Noda, Applied Optics, vol. 26, No. 9, May 1, 1987, pp. 1603-1606.
Guided-wave reflectometry with micrometer resolution by B.L. Danielson and C.D. Whittenberg, Applied Optics, vol. 26, No. 14, Jul. 15, 1987, pp. 2836-2842.
Eye-length measurement by interferometry with partially coherent light by A.F. Fercher, K. Mengedoht, and W. Werner, Optics Letters, vol. 13, No. 3, Mar., 1988, pp. 186-188.
Optical Reflectometry with Micrometer Resolution for the Investigation of Integrated Optical Devices by P. Beaud, J. Schutz, W. Hodel, H.P. Weber, H.H. Gilgen and R.P. Salthe, IEEE J. Quantum Electronics, vol. 25, No. 4, Apr. 1989, pp. 755-759.
Submillimeter Optical Reflectometry by H.H. Gilgen, R.P. Novak, R.P. Salathe, W. Hodel and P. Beaud, J. of Lightwave Technology, vol. 7, No. 8, Aug. 1989, pp. 1225-1233.
Interferometry and Synthesis in Radio Astronomy, by A.R. Thompson, J.M. Moran and G.W. Swenson, Jr. Krieger Publishing Company, Malabar, Florida 1991.
Practical Phased-Array Antenna Systems, Eli Brookner Editor, Artech House, Boston, pp. 2-27 to 2-40.
Water Penetration Sensing Using Wavelength Tunable OTDR by M. Tateda, IEEE Photonics Tech Lett., vol. 3, No. 1, Jan. 1991, pp. 1-3.
Micron-Resolution Ranging of Cornea Anterior Chamber by Optical Reflectometry by D. Huang, J. Wang, C.P. Lin, C.A. Puliafito, and J.G. Fujimoto, Lasers in Surg. and Med., vol. 11, 1991, pp. 419-425.
Polarization-Independent Interferometric Optical-Time Domain Reflectometer by M. Kobayashi, H. Hanafusa, K. Takada, and J. Noda, J. Of Lightwave Technology, vol. 9, No. 5, May 1991, pp. 623-628.
Optical Fiber Component Characterization by High-Intensity and High-Spatial-Resolution Interferometric Optical-Time-Domain Reflectometer by M. Kobayashi, H.F. Taylor, K. Takada, and J. Noda, IEEE Photonics Technology Letters, vol. 3, No. 6, Jun. 1991, pp. 564-566.
Rayleigh backscattering measurement of single-mode fibers by low coherence optical time-domain reflectometer with 14 .mu.m spatial resolution by K. Takada and K-i Yukimatsu, Appl. Phys. Lett., vol. 59, No. 2, Jul. 8, 1991, pp. 143-145.
Resolution Control of Low-Coherence Optical Time-Domain Reflectometer Between 14 and 290 .mu.m by K. Takada, A. Himeno and K-i Yukimatsu, IEEE Phot. Tech Lett., vol. 3, No. 7, Jul. 1991, pp. 676-678.
Phase-noise and shot-noise limited operations of low coherence optical time domain reflectometry by K. Takada, A. Himeno and K. Yukimatsu, A. Phys. Lett., vol. 59, No. 20, Nov. 11, 1991, pp. 2483-2485.
Optical Coherence Tomography by Huang et al., Science, 254, Nov. 22, 1991, pp. 1178-1181.
Measurement of Corneal Thickness by Laser Doppler Interferometry by C.K. Hitzenberger, W. Drexler, and A.F. Fercher, Inv. Ophth & Visual Sci., vol. 33, No. 1, Jan. 1992, pp. 98-103.
High-resolution reflectometry in biological tissues by X. Clivaz, F. Marquis-Weible, R.P. Salathe, R.P. Novak and H.H. Gilgen, Optics Letters, vol. 17, No. 1, Jan. 1, 1992, pp. 4-6.
Simultaneous Thickness and Group Index Measurement Using Optical Low-Coherence Reflectometry by W.V. Sorin and D.F. Gray, IEEE Photonics Technology Letters, vol. 4, No. 1, Jan. 1992, pp. 105-107.
High-speed optical coherence domain reflectometry by E.A. Swanson, D. Huang, M.R. Hee, J.G. Fujimoto, C.P. Lin, and C.A. Puliafito, Optics Letters, vol. 17, No. 2, Jan. 15, 1992, pp. 151-153.
Measurement of corneal thickness by low-coherence interferometry by C.K. Hitzenberger, Applied Optics, vol. 31, No. 31, Nov. 1, 1992, pp. 6637-6642.
In vivo retinal imaging by optical coherence tomography by E.A. Swanson, J.A. Izatt, M.R. Hee, D. Huang C.P. Lin, J.S. Schuman, and C.A. Puliafito, Optics Letters, vol. 18, No. 21, Nov. 1, 1993, pp. 1864-1866.
A Hardware-Compressive Fiber-Optic True Time Delay Steering System for Phased-Array Antennas by A. Goutzoulis, K, Davis, J. Zomp, P. Hrycak and A. Johnson, Microwave J., Sep. 1994, pp. 126-140.
Photonic Aspects of Modern Radar, edited by H. Zmuda and E.N. Toughlican, Artech House, 1994, chapt 13: Switched Fiber-Optic Delay Architectures by A.P. Goutzoulis and D.K. Davies, pp. 351-380.
Coherent optical tomography of microscopic inhomogeneities in biological tissues by V.M. Gelikonov, G.V. Gelikonov, R.V. Kuranov, K.I. Pravdenko, A.M. Sergeev, F.I. Fel'dshtein, Ya.I. Khanin, D.V. Shabanov, N.D. Gladkova, N.K. Nikulin, G.A. Petrova and V.V. Pochinko, JETP Lett., vol. 61, No. 2, Jan. 25, 1995, pp. 158-162.
Optical Coherence Tomography of the Human Retina by M.R. Hee, J.A. Izatt, E.A. Swanson, D. Huang, J.S. Schuman, C.P. Lin, C.A. Puliafito and J.G. Fujimoto, Arch. Ophth., vol. 113, Mar. 1995, pp. 325-332.
Photonic Wideband Array Antennas by J.J. Lee, R.Y. Loo, S. Livingston, V.I. Jones, J.B. Lewis, H-W. Yen, G.L. Tangonan and M. Wechsberg, IEEE Trans. Ant. and Propag, vol. 43, No. 9, Sep. 1995, pp. 966-982.
In Vivo Endoscopic Optical Biopsy with Optical Coherence Tomography by G.J. Tearney, M.E. Brezinski, B.E. Bouma, S.A. Boppart, C. Pitris, J.F. Southern, and J.G. Fujimoto, Science, vol. 276, Jun. 27, 1997, pp. 2037-2039.
Array Transmitters and Their Application in RF-Photonics Systems by W. Ng, S. Bourgholtzer, D. Persechini, H.P. Hsu, H.W. Yen, G. Tangonan, A. Negri, P. Haugsjaa and M. Tabasky, SPIE, vol. 2844, pp. 146-152.
LandOfFree
High speed inspection of a sample using coherence processing of does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with High speed inspection of a sample using coherence processing of , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and High speed inspection of a sample using coherence processing of will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1466473